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日本YAMATO大氣等離子清洗機(jī)YAP510S

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產(chǎn)品型號(hào)YAP510S

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日本YAMATO大氣等離子清洗機(jī)YAP510S ：

Atmospheric Plasma Cleaner

YAP510S(On Patent Applying)
Outline

Atmospheric Plasma Cleaner canbeapplied to wide range of usage such as electronic materialbyutilizing high-activation of high-energy electron and radicalionin plasma reaction.

This equipment has a lotofadvantages;

  • Vacuum Process isnotrequired
  • Simple Utility Preparation(Reactiongas and power supply only)
  • Setting space also is saved(becauseof no vacuum system)
  • Vacuum tank is not required sothatthe wider space is available for various purposes.
Features
  • The sample can bedirectlyplasma-processed just by putting it on the stage.
  • Low Temp. Plasma isavailablebecause of the atmospheric glow-discharging plasma
  • Easily applied to In-linesystembecause of no vacuum system.

Application

  • Surface treatment for highpolymermaterials
  • Glass panel cleaning for FPD
  • Ashing treatment
  • Surface activation(OxidationorDeoxidization)
Specification
Standard Sample Size 300 x300mm (Can be customized)
Power Supply HighFrequency Power Supply (Low Frequency also available)
Power Output 500W
Gas 3 lines(Selectable from Ar, He, O2 and N2)
Gas Flow Rate 1 to10L/min.
Utility PowerSupply AC200V, 3-phase, 15A
Exhaust Duct 10f
Standard Equipment Dimensions 730W x750D x 1,700Hmm

Control

PLC, TouchPanel


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