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日本YAMATO等離子清洗機(jī)PR1000

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產(chǎn)品型號(hào)PR1000

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日本YAMATO等離子清洗機(jī)PR1000:

Plasma Cleaner
PR1000
Plasma Mode
DP
DP:DirectPlasma
Radio-FrequencyOutput
10to1000W
Oscillating Frequency
13.56MHz
ChamberSize(mm)
?300X500D

Barreledtypelargeglass chamber

EquipmentSummary
ThisPlasma cleaner is made up composed ofasfollows;

  • Reaction chamber
  • Matching box fortakingadjustbetween
  • load and RF power
  • Reaction gasflowsystem(CF4 and O2)
  • PLC controllerwithTouchpanel
  • Radio-frequencypowersupply(RF)
  • Vacuum pump
  • Purge gas system (N2)


Specifications
Model PR-1000
* MainUnit
Chambersize ?300×500(D)mm
Chambermethod Quartzglass
Electrode Condenser(4division)
Plasmamode DP mode
Vacuumgauge Capacitancemanometer T
Reactiongas system wosystem(CF4, O2)
Maincontroller PLCcontroller
Display LCDcolordisplayａnd Touch panel (5.7 inch)
Door Manualopen,swingtype
ExternalDimension 700(W)×820(D)×1600(H)mm
* Radio-FrequencyPower Supply
Inputvoltage AC200V8A50/60Hz
Radio-frequency output power 10 to1000W
Referenceoscillator Quartzoscillator
Oscillating frequency 13.56MHz
Outputsetting system Digitalsetting
Matchingadjustment Automatictuning
* VacuumPump
Displacement 670L/min.
Inputpower supply 3 phaseAC200V11A50/60Hz
InletConfiguration NW40
OutletConfiguration NW40
* GasSystem
Purgegas N2
Reactiongas control Massflowcontroller CF4 (F.S.300sccm)
O2 (F.S.300sccm)
System Protectionof Equipment
  1. Protect over current,Builtinprotect over current of Vacuum pump, RF power supplyandmainunit
  2. Protect quartzoscillator,Whenmatching unit have miss matching, Automatic RF powerdownandprotect quartz oscillator
  3. Door panel inter lock, Builtininterlock switch
  4. External coversafetylockswitch
  5. Emergency stop switch
SystemProtections by Software in PLC

When occurredfollowingconditions,Equipment stop and Error will display.

  1. In case of RF power is outofsettingvalue.
  2. In case of gas flow (CF4, O2) is out of setting flow rate.
  3. In case of RFW powerisoverpermission value.
  4. In case of Vacuum pressuredoesnotreach within setting time.
  5. After finish plasmaprocess,chamberdoes not become atmosphere.
Utility
Electricpower supply 3 phaseAC380V20A50/60Hz (Total system) with down transformer
CF4 gas 0.15to0.25Mpa
O2 gas 0.15to0.25Mpa
PressureAir 0.4 to0.6Mpafordriving air valve
Connectingsize 1/4swagelok

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