基本規(guī)格:
SU8 1040(厚高深寬比負光阻0.8 to 10μm)
SU81060(厚高深寬比負光阻6.0 to 50μm)
SU81070(厚高深寬比負光阻15 to 200μm)
SU81075(厚高深寬比負光阻>100μm)
SU8 Developer(顯影液)
SU8 Stripper(去光阻液)
D-35(Metal Ion無機濃縮顯影液)
DS-10(PC-60i &20i去光阻液& NPR-10D顯影液)
VLSI-237(Metal Ion Free有機顯影液)
NPR-20(Negative Photoresist負光阻)
NPR-2500F(Negative Photoresist耐酸負光阻)
NPR-7000F(Negative Photoresist耐酸負光阻)
PR-10(Positive Photoresist正光阻)
PC-20i(Protective Coating樹脂保護膠)
S-100(正負兩用光阻剝膜液& PC-20i有機剝膜液)
S-6000(Positive & Negative Photoresist正負光阻)